MEMS capacitive K-Beam accelerometers for low-frequency applications, 2 … 200 g / 8316A

The family Type 8316A capacitive accelerometers utilize a silicon Micro-Electro Mechanical System (MEMS) variable capacitance sensing element. Each axis consists of a very small inertial mass and a flexure element cantilever positioned between two plates. As the mass deflects under acceleration, the capacitance between these plates changes. AC excitation and synchronous amplitude demodulation circuitry contained in the accelerometer's internal signal conditioner provide an analog output signal proportional to the applied acceleration. This output signal is scaled as voltage and is proportional to the applied acceleration. There are three housing and electrical interface options (AC, TA, TB) which determine the available output signal formats. These accelerometers are powered by a single regulated supply between 6 and 50 VDC.