MEMS capacitive triaxial K-Beam accelerometers for low-frequency applications, 2 … 200 g / 8396A

The Type 8396A triaxial capacitive accelerometer family utilizes a silicon Micro-Electro-Mechanical System (MEMS) variable capacitance sensing element. The sensing element of each axis consists of a very small inertial mass and a flexure element cantilever positioned between two plates. As the mass deflects under acceleration, the capacitance between these plates changes. AC excitation and synchronous amplitude demodulation circuitry contained in the accelerometer's internal signal conditioner provide an analog output signal proportional to the applied acceleration. This output signal is scaled as a voltage which is proportional to the applied acceleration.