Dynamic measurement technology boosts yield and productivity for semiconductor manufacturers

Semiconductor manufacturing is becoming more complex and challenging. Today's manufacturers must rely on efficient process monitoring – but conventional measuring methods alone can no longer guarantee the required quality standards. This is why force measurement is emerging as a critical factor in many front-end and back-end production processes: grinding, dicing, polishing, CMP, wafer handling, die sorting, wire bonding, flip-chip, molding and encapsulation, pick-and-place handling, testing – and many more.

Piezoelectric measurement technology from Kistler ensures high-resolution monitoring and control of the forces applied during semiconductor manufacturing processes – no matter how small.

Conventional metrology may be unable to access force, as a physical quantity that can cause device failure – but piezo-based force measurement "makes the invisible visible".
Process visibility based on dynamic force measurement technology delivers impressive benefits for the semiconductor manufacturing industry

• Early detection of mechanical stress deviations
• Downforce precision with closed loop control
• Product traceability and process optimization
• Enhanced machine performance
• Reduced quality costs

As well as measurement technology backed by decades of experience, Kistler's customers enjoy another key benefit: one single source for the entire measuring chain. Our portfolio includes everything from state-of-the art sensor technology and advanced data acquisition units through to hardware and software for precise data analysis and visualization of the measurement results. Here are three examples of measuring chains featuring dynamic force measurement technology – and all the components are available from Kistler, the one-stop shop.

The piezoelectric sensor measures the force. The industrial charge amplifier then converts the charge into an electrical signal equal to the measured process force. Finally, the signal is transmitted to the programmable logic controller (PLC) or industrial PC at the end of the measuring chain.

Benefits of the measuring chain

• Process control: precise closed-loop control
• Process monitoring: more direct correlation to product quality parameters
• Process traceability: data as basis for documentation and process optimization

The piezoelectric sensor measures the force. Thanks to the maXYmos process monitoring system, users can check and evaluate the quality of each individual production step with the help of a force/time or displacement curve. The major advantage of this measuring chain: every production step can be checked and visualized to determine whether the part is good or bad.

Benefits of the measuring chain

• Process control: precise closed-loop control
• Process monitoring: more direct correlation to product quality parameters 
• Process traceability: data as basis for documentation and process optimization

In this measuring chain, force is measured by a piezoelectric sensor and a laboratory charge amplifier then converts the charge signal from the sensor into a proportional output voltage. The laboratory charge amplifier features an extremely wide charge and frequency range as well as outstanding noise performance, making this measuring chain an ideal choice for performing R&D tasks.

Benefits of the measuring chain

• Process control: precise closed-loop control
• Process monitoring: more direct correlation to product quality parameters 
• Process traceability: data as basis for documentation and process optimization

Our experts will be glad to advise you on any specific application or suggest the optimum choice of products for your measuring chain.